Early in the morning on June 15, Luo Sheng came to the Costa delta of the Blue Sky Laboratory. The most exciting news for him in the second half of this year is that the mass-producible euv extreme ultraviolet lithography prototype will be released during this period.

At around 8 o'clock in the morning, Luo Sheng came to a 22,580-square-meter dust-free studio in the Costa delta. Everyone inside was wearing dust-free suits to enter.

At this moment, there are more than a hundred technicians in the room, all of whom are top engineers, and more than two-thirds of them are technical masters from major companies in the field of precision manufacturing in China.

Luo Sheng used Shengfeng Capital as a link and used lithography machines as the core to gently fight this force against a target for five years five years ago. This collective struggle lasted for five years.

Without the financial support of Shengfeng Capital and the technical support of the Costa del Blue, this team would not have been formed, and it would have been impossible to work together to fight a technical node.

"Mr. Luo is here!"

"Mr. Luo."

"Mr. Luo is early."

Everyone stopped communicating when they saw or heard this, and looked at Luo Sheng who was here, and everyone respected him very much.

The lithography machine module is too complex, with tens of thousands of precision components, which means a huge industrial chain needs to be coordinated, and long-term support of capital and the risk of losing all the money.

This is almost impossible, but Luo Sheng has allowed all those who are focused on this field to achieve something and break the Asml monopoly to see hope, and now the future is even more promising.

In fact, the world's first euv lithography machine prototype was born in 2006. It was launched by Asml. In 2010, the first R&D prototype nxe3100 was built. This year was also the first year when Luo Sheng initiated the research and development of domestic euv lithography machines. From this year on, he began to fight against this technical pain point.

This year, according to foreign media reports, Asml finally created mass-produced prototypes this year, 2015. During this research and development process, there were definitely a lot of blood transfusions from major semiconductor manufacturers such as Intel, Samsung and Kujiji.

However, in the research and development of domestic euv lithography machines, Luo Sheng is almost supported by the issue of blood transfusion. With this courage alone, no one dares to do this, because the investment is huge.

Everyone gave way to Luo Sheng. He came to a transparent glass isolation wall and stood there. Looking at the scene inside the isolation wall, a precise equipment was modularly assembled under the operation of dozens of staff.

"The art of this size is the best praise for capital. It's not in vain that I spent five years burning more than 600 billion yuan into it." Luo Sheng murmured to himself as he looked at the scene inside. He was quite satisfied with the development progress of the lithography machine equipment.

In the past five years, in order to build domestic euv extreme ultraviolet lithography equipment, US$20 billion has been invested every year, and so far it has been about US$100 billion. The investors of this money are Costa del Azure and Shengfeng Capital, and there are no third parties other than that.

Luo Sheng paid for his money and technology, and other friendly partners distributed investment funds and related technologies according to their field of work. Starting to fight hard around this industrial chain. Companies that can join this team are basically doing practical things.

Of course, there are also people who cheated money. Over the past five years, more than a dozen manufacturers have cheated Luo Sheng for dozens of dollars. The money has been completely wasted, but these manufacturers have also been kicked out and some have been sentenced.

Such risks are within the acceptable range of Luo Sheng. He will not really expect that there are no bad people in the team. He is not afraid of bad people, but he is afraid that there are bad people who have not been found. However, the team is clean now.

They may all have their own little ones. Luo Sheng does not expect them to have lofty ideals of selfless dedication to their careers, which is also an unrealistic utopian idea.

But it doesn't matter. Just maintain the market and common interests. If you get vested interests, you will do your best to this benefit.

A technical person in charge from a friendly company present walked to Luo Sheng, "Mr. Luo, the main performance indicators of lithography machines support the substrate size range, resolution, alignment accuracy, exposure method, light source wavelength, light intensity uniformity, production efficiency and other technical pain points have been solved at present."

Luo Sheng nodded and asked, "What about the technical problems in the light source system?"

The other party immediately replied: "It's basically solved."

Luo Sheng: "Basic? That is, it has not been completely solved yet, and it will be solved as soon as possible."

It is worth mentioning that the composition of the EUV light source system is composed of three major units: light generation, light collection, spectrum purification and homogenization. The related working components mainly include high-power co2, laser, multi-layer coating mirror, load, light collector, mask plate, projection optical system to form plasma. The plasma is reflected multiple times by multi-layer film reflector to obtain 13.5 nanometers of EUV light.

Just such a light source problem involves more than a dozen manufacturers to develop supporting facilities, which shows that the difficulty of manufacturing this thing is so high. Just spending enough money is still secondary, and technology is even more important. Domestic related manufacturers actually do not have core technology.

Fortunately, the technology that Luo Sheng mastered himself obtained was then obtained by Xiaona's completion simulation of euv lithography machines, and then distributed the technology to major manufacturers to manufacture according to the standards, and also authorized the technology to them.

It is precisely because of technical authorization that major manufacturers can be kept together.

Rely on enlightenment and ideals?

Although Luo Sheng likes to say this, he never does it.

Otherwise, if such a complex chain is in a state of turmoil, everyone will stare at it. This is something that Luo Sheng cannot allow. The investment cost, time cost, and sunk costs are all astronomical. They must be given some constraints, otherwise the team will be difficult to lead.

The naming of extreme ultraviolet lithography machines has long been determined, code-named "Purple Star Lithography Machine", which is also the most advanced lithography machine equipment produced by domestic independent research and development without relying on foreign technology at that time.

The advent of Zixing lithography machine will announce that domestic lithography machine equipment is in the same echelon as ASML's Euv lithography machine, completely breaking the situation where top lithography machine equipment is monopolized by foreigners.

Luo Sheng withdrew his gaze and looked at the technical experts sent by the major manufacturers present and said: "The purple star lithography machine can use extreme ultraviolet light with a wavelength of 13.5 nanometers to achieve chip production with 14 nanometers, 10 nanometers, and 7 nanometers. Through technological iteration and upgrading, chip production with 9 nanometers, 8 nanometers, 6 nanometers, 5 nanometers, 4 nanometers and even 3 nanometers can also be achieved in the future."

"The Costa delta has been doing technology upgrade solutions. Upgrades and iterations must be coordinated. When necessary, major supply chain partners come to me to authorize and distribute technology. After you go back, you will bring the words to your boss. I won't contact them one by one."

Everyone nodded repeatedly. To put it simply, this model is especially theoretical. Costa delta is doing these things.

The supply chain partner is responsible for realizing Luo Sheng’s idea, which is to create the physical objects according to the standards. No one is even more difficult to say, but it is more difficult to be creative.

You should know that if you hand over these technologies to the third brother next door, they can’t handle it even if they copy them according to the rules, you must have a foundation to make physical equipment according to the standards. This is the foundation of the manufacturing industry.

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Chapter completed!