Since he guessed that Qu Hui had made a breakthrough in the technology of the double workpiece table, Su Yuanshan was really unable to sit still next.

But he knew Qu Hui too much.

This sister is not only capable and generous, but also weird... Since she has made up her mind to circle around herself, no matter how she asks, she will have no result.

Fortunately, an hour was not long, and when he opened a paper in the latest graphene field, time quickly passed.

Well, it is mainly because he rarely encounters a graphene paper that is not flooded now.

...

An hour later, Qu Hui and Zheng Zhenchuan arrived as promised.

"Uncle Zheng, Sister Hui, long time no see." Su Yuanshan had been waiting by the guest sofa, and even the tea was ready.

"Well, there's a lot of time." Qu Hui unexpectedly left her hair, combed her ponytail, and had a scarf around her neck. She sat opposite Su Yuanshan with a smile.

"You can tell me now. What kind of surprise is it - don't let me guess."

"Actually, it's the workpiece table." Qu Hui looked calm and gentle, picked up the teacup and blew it, and said with a smile: "You guessed it, right?"

"You come with Uncle Zheng, what else can you do if you are not a lithography machine?" Su Yuanshan spread his hands and smiled: "I asked me to wait for an hour, and no matter how surprised I was, I would be fine."

"I should have called Zhou Xiaohui secretly to ask-bye, where is Zhou Xiaohui?"

"I don't know, I guess it's on Tianju. Someone from Deyi happened to come here today, so she went to receive it." Su Yuanshan paused and looked at Zheng Zhenchuan: "Uncle Zheng, don't tell me, you have used the workpiece table on the lithography machine."

"Haha, of course not."

Zheng Zhenchuan put down his teacup and said to Su Yuanshan: "You listen to the little song first, I will talk about it later."

"Well..." Su Yuanshan felt a little more "warning" when he heard Zheng Zhenchuan's tone.

This old man sounds wrong!

This time, love is not just a "good news", it seems that there is still a trap waiting for me.

However, he remained calm and relaxed his posture: "Sister Qu Hui, what's going on in the workpiece table?"

"It's done, but it's a little troublesome." Qu Hui knew that Su Yuanshan had invested less effort on lithography machines than wafer fabs, so she didn't joke at this moment, and became serious: "You know, the biggest enemy that restricts the accuracy of domestic lithography machines is precision."

Su Yuanshan nodded: "Well, you don't need to say that, even if I don't understand machinery, I know."

"The biggest problem of accuracy will eventually fall on motor control, materials, and processing accuracy." Qu Hui pursed her lips and said slowly.

"The concept of a double workpiece table is based on Mr. Hua Luogeng's idea of ​​the overall method. The principle is to take the process of waiting in the exposure process first. A workpiece table is exposed while performing measurement and alignment. When the exposure is completed, you can no longer measure and alignment, so that the platform can be moved directly and then exposed."

"According to our estimates, under the current process level, using a double workpiece table can not only improve efficiency by more than 30%, but also slightly improve accuracy - not to mention anything else, at least 10% is at least some."

Su Yuanshan nodded again: "What about?"

"The breakthrough we have made this time is in the motion positioning module and the process control system."

Su Yuanshan raised his eyebrows when he heard this!

Even if he doesn't understand the design and principles of the double workpiece table, he knows that the most difficult convenience in realizing a double workpiece table is the motion positioning system, which is the real "to move the whole body" and "a slight difference, a thousand miles of mistakes".

Moreover, Su Yuanshan also knew that the first-generation dual workpiece table of Asml was not very efficient, so it could only be said to be slightly improved - because the control system was immature. Otherwise, it would not be officially sentenced to Nikon and Canon until the immersion lithography machine came out.

When the dual workpiece technology is truly mature, we must wait until the magnetic levitation technology is born. Only in this way can the error be shortened to the limit.

But the premise of everything is the control system.

So... since you have made a breakthrough, what else is there to worry about?

"Where is the trouble?"

"The trouble is that we can only achieve 0.5 micron accuracy at present." Qu Hui tightened her eyebrows and stared at Su Yuanshan and said, "And, the higher the accuracy, the stronger the friction coefficient and damping effect. I'm a little worried whether it can catch up with the pace of lithography machines in the future."

"I'll confess to you. At present, the first-hand essence is generally very excited - although I am happy, I know that I can't pour cold water. But if the workpiece table cannot be used on the most advanced lithography machine, it will have much less meaning."

"There is another point that our current industrial foundation can only allow us to reach this limit."

Su Yuanshan listened to Qu Hui's introduction silently and finally understood where her worries were.

A few seconds later, Su Yuanshan smiled and shook his head: "Sister Qu Hui, you are actually very awesome."

His words are not to comfort people, but to think so sincerely.

Although he rarely goes directly to the Capital Jingke, he never spares any effort in all kinds of support. He gives him any assistance whenever he needs a machine tool. Even if he needs a machine tool, he went through a lot of trouble the year before yesterday.

Therefore, the double workpiece table is nominally a technology developed by a company called Capital Jingke, but in fact, it is a technical research jointly carried out by four giants such as the former Capital Precision Instrument Research Institute, Yuanxin, Zhiyuan and Tsinghua University.

In terms of lineup, this team is already luxurious.

You should know that it is no better to engage in programming than to engage in programming.

Programming can clamor for "only imagined, nothing can be done", but mechanical design is really, you can think of it, but basically it can't be done.

To put it bluntly, as Qu Hui said, it comes from Mr. Hua Luogeng's overall method - it is to wash the tea cup while waiting for the boiling water, take out the tea leaves and throw them into the cup, and twist the kettle to wait aside. As long as the water boils, you can make tea immediately, fill it with water, and complete it in one go. It will save a lot of time than to find the tea leaves to wash the tea cup when the water boils.

But it is not easy to achieve. After all, this is the coordination of two workpiece tables, and the movement accuracy of 0.5 microns at high speed movement is maintained - the difficulty is equivalent to two planes flying side by side, one of which extends a pole and carves a 0.5 micron-sized word on the opposite fuselage.

As for why Qu Hui remained calm and even worried after achieving such results... Su Yuanshan could fully understand.

Because Qu Hui entered Yuanxin as soon as she left school, participated in the birth of EDA, and witnessed Yuanxin's rise in various fields with her own eyes.

To put it bluntly, what Qu Hui participated and saw were all the world's top technical achievements.

Although the double workpiece table has come out, it cannot bring an essential technological leap to domestic lithography machines.

She was unwilling to give up.

"In this way, Sister Qu Hui, I'll point you a direction." Su Yuanshan didn't know which side the dual-workpiece technology would go next, but Su Yuanshan knew where the future of the dual-workpiece platform was.

"Hmm? What direction did you say?"

"The biggest difficulty of workpiece tables is the series of troubles caused by high-speed movement, so... if you want to focus your attention to the nano-level accuracy in ten years, twenty years later, I think there is only one way, which is magnetic levitation."

"Magnetic levitation?" Qu Hui was stunned when she heard this and stared at Su Yuanshan blankly.

Zheng Zhenchuan was also surprised: "Xiaoshan, can magnetic levitation be used on the workpiece table?"

"It is not that magnetic levitation can be used on the workpiece table, but that the workpiece table must get rid of the shackles of friction and damping and achieve ultra-precision motion control. Under the framework of the existing natural science and mechanical empty city, there is only the magnetic levitation path."

Qu Hui was silent for a few seconds and nodded slowly and murmured: "Yes, magnetic levitation technology can maximize the advantages of our motion control module and avoid shortcomings."

"But, that's a bit difficult, right? Are there any super-precision magnetic levitation motion control cases and solutions now?" Zheng Zhenchuan thought for a while and asked hesitantly.

"I don't know, but I don't care!" Qu Hui took a breath, and her whole body became excited in an instant, looking at Su Yuanshan and said, "Xiaoshan, do you really think that's the direction?"

"The only direction I can think of." Su Yuanshan and Zheng pointed.

*

*

Qu Hui, who had a new direction, had no intention of talking anymore and turned to Su Yuanshan's bookshelf to read a physics book.

Seeing Qu Hui like this, Su Yuanshan also laughed secretly in his heart. Although Qu Hui is already thirty years old, she has been in the front line of scientific research for a long time and has an unparalleled identity and wealth, so her mentality is still a girl.

"Uncle Zheng, what do you mean?" Su Yuanshan stood up and filled Zheng Zhenchuan with tea, and asked with a smile: "Don't tell me, you are here to promote lithography machines."

"Well, it's true." Zheng Zhenchuan came back to his senses from the idea of ​​the magnetic levitation workpiece table in Su Yuanshan Pass just now and said with a smile: "We got Zeiss' lens and Cymer's KRF light source, and then we will have a lithography machine with a minimum energy production of 0.18 micron process node."

"Damn!"

Su Yuanshan glared at his eyes and almost bounced up from the sofa: "How did you get it?"

"Haha, don't be excited." Zheng Zhenchuan took a sip of tea leisurely: "How about it, do you want two?"

"Wait!" Su Yuanshan immediately woke up: "Don't use a blank check to fool me. Let me explain clearly first when it will be possible to leave the factory."

"At most half a year."

After hearing this half year, Su Yuanshan silently calculated the time of his own light source, and then slowly calmed down, and cursed with a smile: "nnd, imperialism is undead to destroy me."

"Yes...but this will at least reduce the distance between our lithography machine and Nikon Canon to only one generation, right?"

"Well, that's true."

Su Yuanshan looked at Zheng Zhenchuan with a smile, and suddenly the more he looked at him, the more he felt that the old man looked a bit like a "comprador".

Obviously, at this time, Zeiss and Cymer suddenly released domestic lithography machines. In addition to the competition from Niguo peers, they also had the idea of ​​"suffocating" domestic light source and lens technology in the cradle.

You know, the light sources and lenses they provide are not the most advanced...

Cymer has already created arf for 193 and is trying to do euv or f2.

"But Uncle Zheng, we have booked Nikon's most advanced duv lithography machine, and their nodes can reach 65 nanometers." Su Yuanshan shrugged and laughed: "It's almost half a year."

"..." Zheng Zhenchuan looked at Su Yuanshan with a sad face: "Where did you agree to support me?"

"Of course I have always supported it, but I can't make the decision on this matter, Uncle Zheng. You shouldn't look for me, but you should go to Dr. Zhang from Deyuan."

As he said that, Su Yuanshan became confused: "No, Uncle Zheng... There are so many wafer factories in Wuxi, why don't you go to find them?"

Yuanxin’s strategic direction for lithography machines and fabs has always been clear, which is to maintain the leading process and process - in other words, it cannot lag behind in equipment.

Lithography machines naturally need to support them, and even strongly support them. But if you have a choice, you can buy a bunch of backward products, but you can't do this.

The country also agrees with the development of Yuanxin, so it has always placed its hopes on Yuanxin, and then let new and old state-owned wafer fabs such as Huajing, Huaxin, and Shoujing vigorously purchase domestic lithography machines for support.

So Zheng Zhenchuan looked for Su Yuanshan but did not find the right person.
To be continued...